Design and Fabrication of a 3-DOF Piezoresistive Micro Accelerometer: A Completed Work from Design, Simulation, Fabrication to Performance Analysis: Tran-Duc, Tan: 9783848447435: Amazon.com: Books
Design of a Monolithic 3DOF MEMS Capacitive Accelerometer: Utilizing Surface Micromachining Technology Using PolyMUMPS Process: Khan, Muhammad Shuja: 9783845409528: Amazon.com: Books